By: Norbert Lorenz Over the past few years the interest in Micro-Electro-Mechanical-Systems (MEMS) and Micro-Optical-Electrical-Mechanical-Systems (MOEMS) from research institutions, industrial firms and the press has risen considerably. Of particular interest are lab-on-a chip devices where many subsystems (ICs and MEMS) are assembled to a functional system for medical and bio-photonic applications. To date the main […]

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