Femtosecond Laser Micromachining of Fused Silica for Microfluidic and Micro-Optical Applications

By: Ya Cheng, Fei He, Yang Liao, Lingling Qiao, Zhizhan Xu, Koji Sugioka and Katsumi Midorikawa State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, China Laser Technology Laboratory, RIKEN – Advanced Science Institute, Japan Nowadays, microfluidic systems for controlling and manipulating tiny volumes of liquids with high precision have attracted […]

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