Laser Fabrication of Nanobump Arrays on Si Substrate Via Optical Near-Field Enhancement

By: X.C. Wang, H.Y. Zheng, C. W. Tan, F. Wang, H. Y. Yu, K. L. Pey Singapore Institute of Manufacturing Technology (SIMTech), Singapore School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore Modern technology requires the ability of creating smaller and smaller devices. Whether it is for information storage, high definition displays or sensor arrays, […]

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